1/7/2012	7:16:47 PM	Main Vac valve closed
1/7/2012	7:17:15 PM	H2 MFC set to  500.000000
1/7/2012	7:17:15 PM	H2 valve opened
1/7/2012	7:18:34 PM	H2 valve closed
1/7/2012	7:18:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2012	7:18:37 PM	Recipe started at 7:18 PM
1/7/2012	7:18:37 PM	Helium valve closed
1/7/2012	7:18:37 PM	H2 valve closed
1/7/2012	7:18:37 PM	BCl3 valve closed
1/7/2012	7:18:37 PM	PH3 valve closed
1/7/2012	7:18:37 PM	SiCl4 pre valve closed
1/7/2012	7:18:37 PM	SiCl4 post valve closed
1/7/2012	7:18:37 PM	Main Vac valve closed
1/7/2012	7:18:37 PM	Bubbler valve closed
1/7/2012	7:18:37 PM	Bypass valve opened
1/7/2012	7:18:37 PM	Helium MFC set to  0.000000
1/7/2012	7:18:37 PM	H2 MFC set to  0.000000
1/7/2012	7:18:37 PM	BCl3 MFC set to  0.000000
1/7/2012	7:18:37 PM	PHl3 MFC set to  0.000000
1/7/2012	7:18:37 PM	SiCl4 MFC set to  0.000000
1/7/2012	7:18:37 PM	Bypass solenoid MFC set to  0.000000
1/7/2012	7:18:37 PM	Tube furnace set to 0
1/7/2012	7:18:46 PM	Run aborted at 7:18 PM
1/7/2012	7:18:46 PM	Helium valve closed
1/7/2012	7:18:46 PM	H2 valve closed
1/7/2012	7:18:46 PM	BCl3 valve closed
1/7/2012	7:18:46 PM	PH3 valve closed
1/7/2012	7:18:46 PM	SiCl4 pre valve closed
1/7/2012	7:18:46 PM	SiCl4 post valve closed
1/7/2012	7:18:46 PM	Bypass valve closed
1/7/2012	7:18:46 PM	Main Vac valve closed
1/7/2012	7:18:46 PM	Bubbler valve closed
1/7/2012	7:18:46 PM	Helium MFC set to  0.000000
1/7/2012	7:18:46 PM	H2 MFC set to  0.000000
1/7/2012	7:18:46 PM	BCl3 MFC set to  0.000000
1/7/2012	7:18:46 PM	PHl3 MFC set to  0.000000
1/7/2012	7:18:46 PM	SiCl4 MFC set to  0.000000
1/7/2012	7:18:46 PM	Tube furnace set to 0
1/7/2012	7:18:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2012	7:18:51 PM	PHl3 MFC set to  20.000000
1/7/2012	7:18:52 PM	PH3 valve opened
1/7/2012	7:18:56 PM	Bypass valve opened
1/7/2012	7:21:59 PM	Bypass valve closed
1/7/2012	7:21:59 PM	Bypass valve opened
1/7/2012	7:22:00 PM	Bypass valve closed
1/7/2012	7:22:00 PM	Main Vac valve opened
1/7/2012	7:41:11 PM	H2 MFC set to  500.000000
1/7/2012	7:41:13 PM	Main Vac valve closed
1/7/2012	7:41:14 PM	H2 valve opened
1/7/2012	7:42:34 PM	H2 valve closed
1/7/2012	7:42:37 PM	Bypass valve opened
1/7/2012	7:43:41 PM	Bypass valve closed
1/7/2012	7:43:42 PM	Main Vac valve opened
1/7/2012	8:00:51 PM	Main Vac valve closed
1/7/2012	8:00:52 PM	H2 valve opened
1/7/2012	8:02:12 PM	H2 valve closed
1/7/2012	8:02:23 PM	Bypass valve opened
1/7/2012	8:03:37 PM	Bypass valve closed
1/7/2012	8:03:38 PM	Main Vac valve opened
1/7/2012	10:21:21 PM	Main Vac valve closed
1/7/2012	10:21:22 PM	H2 valve opened
1/7/2012	10:22:44 PM	H2 valve closed
1/7/2012	10:22:45 PM	Bypass valve opened
1/7/2012	10:31:31 PM	Bypass valve closed
1/7/2012	10:31:31 PM	Main Vac valve opened
